Transfer apparatus and transfer method

ABSTRACT

According to one embodiment, a transfer apparatus includes a coating part for coating an uncured resin on a substrate, a substrate installation part for positioning and installing the substrate integrally, a mold installation part for installing a sheet-like mold, a transfer roller for transferring a fine transfer pattern formed on the mold to the resin coated on the substrate, and a plasma unit for cleaning the mold by irradiating plasma to the mold peeled off from the resin after transferring. After cleaning by the plasma using the plasma unit, the cleaned mold is used again for transferring of the transfer pattern.

CROSS REFERENCE TO RELATED APPLICATION

This application is based upon and claims the benefit of priority fromJapanese Patent Applications No. 2017-205735 and No. 2017-205737, filedOct. 25, 2017, No. 2018-164266, filed Sep. 3, 2018, and No. 2018-194765,filed Oct. 16, 2018; the entire contents of which are incorporatedherein by reference.

FIELD

Embodiments described herein relate generally to a transfer apparatusand a transfer method, particularly, a transfer apparatus and a transfermethod for transferring a fine transfer pattern formed on a mold to aresin coated on a substrate.

BACKGROUND

In a conventional example, there is known a transfer apparatus fortransferring a fine transfer pattern formed on a mold to a resin coatedon a substrate (see U.S. Pat. No. 9,604,402 B2). In the conventionaltransfer apparatus, the mold used for transfer is arranged so as toextend between a rolled web mold and a winding roll.

In the conventional transfer apparatus, in order to reduce the amount ofused mold, there is a case that the mold used for transfer (i.e. themold extending between the rolled web mold and the winding roll) isrepeatedly used several times to perform transfer to a plurality ofsubstrates.

SUMMARY

In the conventional transfer apparatus, as the mold is repeatedly usedseveral times, the shape of a pattern transferred to the substrate couldbe deteriorated since the releasing property of the mold gets worse(that is, the difficulty in peeling off the mold from a resin afterpressing the transfer pattern against the resin of the substrate andsubsequently curing the resin gets increased) or substances (e.g. finedusts) adhered to the transfer pattern on the mold get increased.

In consideration of the above problem, an object of the presentapplication is to provide a transfer apparatus for transferring a finetransfer pattern formed on a mold to a resin coated on a substrate,which can prevent the releasing property of the mold and the shape ofthe pattern transferred to the substrate from being deteriorated evenwhen the mold is repeatedly used several times.

According to a first aspect of the present application, there isprovided a transfer apparatus for transferring a fine transfer patternformed on a mold to a resin coated on a substrate, including: a coatingpart configured to coat the resin in an uncured state on the substrate;a substrate installation part configured to position and install thesubstrate therein integrally; a mold installation part configured toinstall the mold in a form of a sheet therein; a transfer rollerconfigured to transfer the fine transfer pattern formed on the mold tothe resin coated on the substrate; and a plasma unit configured toirradiate plasma to the mold peeled off from the resin after thetransfer pattern formed on the mold is transferred to the resin coatedon the substrate, thereby cleaning the mold The mold peeled off from theresin on the substrate is used again for transfer of the transferpattern after being cleaned by irradiation of the plasma by the plasmaunit.

The plasma unit may be configured to change an irradiation dose of theplasma to the mold according to the number of times when the transfer isperformed by the mold.

The transfer apparatus of the first aspect may further include: a rolledweb mold configured to wind the mold therearound; and a winding rollconfigured to be capable of winding up the mold fed out from the rolledweb mold. The transfer roller may be wound with the mold extendingbetween the rolled web mold and the winding roll. The transfer apparatusmay be configured to: perform both pressing of the mold against theresin and peeling of the mold from the resin, by roll-transferring ofmoving the transfer roller on condition that the transfer roller ispressing the mold against the resin; and allow the plasma unit toirradiate the plasma to the mold after the peeling of the mold from theresin is completed.

The transfer apparatus may be configured so that, when the cleaning ofthe mold by the plasma unit is insufficient, the winding roll operatesto wind up a portion of the mold peeled off from the resin and instead,a new portion of the mold is unwound from the rolled web mold.

The transfer apparatus may further include a mold detecting partconfigured to detect contamination of the mold peeled off from theresin. The transfer apparatus may be configured to judge whether or notthe cleaning of the mold by the plasma unit is insufficient according toa detection result by the mold detecting part.

According to a second aspect of the present application, there isprovided a transfer apparatus for transferring a fine transfer patternformed on a mold to a resin coated on a substrate, including: a coatingpart configured to coat the resin in an uncured state on the substrate;a substrate installation part configured to position and install thesubstrate therein integrally; a mold installation part configured toinstall the mold in a form of a sheet therein; a transfer rollerconfigured to transfer the fine transfer pattern formed on the mold tothe resin coated on the substrate; and a plasma unit configured toirradiate plasma to the substrate. The plasma unit includes a head and adriver. The coating part and the plasma unit simultaneously move inrelation to the substrate, and the coating part coats the resin in anuncured state on the substrate while the plasma is irradiated to thesubstrate by the plasma unit.

The plasma unit may be configured to irradiate plasma also to the moldpeeled off from the resin on the substrate after transfer. Inconnection, the driver of the plasma unit may be supported by thecoating part, and the plasma may be irradiated from the plasma unitdriven by the driver to the substrate and the mold peeled off from theresin on the substrate after transfer.

The plasma may be irradiated from the head of the plasma unit to thesubstrate and the mold peeled off from the resin on the substrate aftertransfer.

The head may be provided so as to enable rotation positioning to thecoating part, and the transfer apparatus may be configured so that aposture of the head when the plasma is irradiated from the head to thesubstrate rotates in relation to the posture of the head when the plasmais irradiated from the head to the mold by a predetermined angle.

According to a third aspect of the present application, there isprovided a transfer method for transferring a fine transfer patternformed on a mold to a resin coated on a substrate, including: coatingthe resin in an uncured state on the substrate with use of a coatingpart; and irradiating plasma to the substrate with use of a plasma unit,wherein, the plasma unit includes a head and a driver, and withsimultaneous movement of the coating part and the plasma unit inrelation to the substrate, the resin in the uncured state is coated onthe substrate at the step of coating while irradiating the plasma to thesubstrate at the step of irradiating.

According to a fourth aspect of the present application, there isprovided a transfer apparatus for transferring a fine transfer patternformed on a mold to a resin coated on a substrate, including: a coatingpart configured to coat the resin in an uncured state on the substrate,the resin being curable by an electromagnetic wave having apredetermined wavelength; a substrate installation part configured toposition and install the substrate therein integrally; a moldinstallation part configured to install the mold in a form of a sheettherein; a plasma unit configured to irradiate plasma to the substrate;a transfer roller around which the mold is wound, the transfer rollerbeing configured to perform both pressing of the mold against the resinand peeling of the mold from the resin, by roll-transferring of movingthe transfer roller on condition that the transfer roller is pressingthe mold against the resin; a resin curing part configured to irradiatethe electromagnetic wave having the predetermined wavelength to theresin under condition that the transfer roller is pressing the moldagainst the resin of the mold; and a control unit configured to controlthe resin curing part so that the electromagnetic wave having thepredetermined wavelength is irradiated to the resin when the transferroller moves in a direction to press the mold against the resin by theroll-transferring.

The control unit may be configured to control the resin curing part sothat the electromagnetic wave having the predetermined wavelength isirradiated to the resin even when the transfer roller moves in adirection to peel off the mold from the resin on the mold by theroll-transferring.

The control unit may be configured to control the resin curing part sothat the intensity of the electromagnetic wave having the predeterminedwavelength to be irradiated to the resin is adjusted according to amoving amount of the transfer roller in the roll-transferring.

The coating part may include a plurality of inkjet heads arranged in astaggered manner. The substrate may be coated by discharging the uncuredresin in the form of fine particles through the plurality of inkjetheads.

The control unit may be configured to control the coating part so thatthe uncured resin coated on the substrate is formed in a shape accordingto the fine transfer pattern formed on the mold.

The control unit may be configured to control: the coating part so thatthe uncured resin is adjusted and coated corresponding to the transferpattern formed on the mold; and the resin curing part so that theintensity of the electromagnetic wave having the predeterminedwavelength is adjusted according to an amount of the resin coated on thesubstrate.

According to these aspects of the present application, in the transferapparatus for transferring a fine transfer pattern formed on a mold to aresin coated on a substrate, it is possible to prevent the releasingproperty of the mold and the shape of the pattern transferred to thesubstrate from being deteriorated even when the mold is repeatedly usedseveral times.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a view illustrating a schematic configuration of a transferapparatus according to an embodiment.

FIG. 2 is a view as viewed in the direction of an arrow II of FIG. 1.

FIG. 3 is a view as viewed in the direction of an arrow III of FIG. 1.

FIG. 4 is a view as viewed in the direction of an arrow IV of FIG. 1.

FIG. 5 is an enlarged view of a part V of FIG. 2.

FIG. 6 is a view illustrating the operation of the transfer apparatusaccording to the embodiment.

FIG. 7 is a view illustrating the operation of the transfer apparatusaccording to the embodiment.

FIG. 8 is a view illustrating the operation of the transfer apparatusaccording to the embodiment.

FIG. 9 is a view illustrating the operation of the transfer apparatusaccording to the embodiment.

FIG. 10 is a view illustrating the operation of the transfer apparatusaccording to the embodiment.

FIG. 11 is a view illustrating the operation of the transfer apparatusaccording to the embodiment.

FIG. 12 is a view illustrating the operation of the transfer apparatusaccording to the embodiment.

FIG. 13 is a view illustrating the installation of a mold on thetransfer apparatus according to the embodiment.

FIG. 14 is a view illustrating the installation of the mold on thetransfer apparatus according to the embodiment.

FIG. 15 is a view illustrating the installation of the mold on thetransfer apparatus according to the embodiment.

FIG. 16 is a view illustrating the installation of the mold on thetransfer apparatus according to the embodiment.

FIG. 17 is a view illustrating the installation of the mold on thetransfer apparatus according to the embodiment.

FIGS. 18A to 18C are views illustrating the operation of a transferroller and the like of the transfer apparatus according to theembodiment.

FIGS. 19A to 19D are views illustrating the transfer operation of thetransfer apparatus according to the embodiment.

FIG. 20 is a view illustrating the form of a resin in a modification,which has been coated at a coating part of the transfer apparatusaccording to the embodiment.

FIGS. 21A and 21B are views illustrating the arrangement where atransfer roller guide is provided in a substrate holding part in thetransfer apparatus according to the embodiment, and FIG. 21C is anenlarged view of a part XXIC of FIG. 21A.

FIGS. 22A and 22B are views illustrating the hardening condition of aresin on a substrate installed on the substrate holding part of thetransfer apparatus according to the embodiment.

FIG. 23 is an enlarged view of a part XXIII of FIG. 1.

FIG. 24A is a view illustrating a transfer pattern transferred to thesubstrate and FIG. 24B is a view illustrating a section taken along aline XXIVB-XXIVB in FIG. 24A.

DETAILED DESCRIPTION

A transfer apparatus according to an embodiment will be described withreference to FIGS. 1 to FIG. 24B.

As will be obvious from FIGS. 19A to 19D, the transfer apparatus 1according to the embodiment is provided to transfer a fine transferpattern 9, which has been formed on a mold 7, to a thin film-like resin5 coated on the upper surface of a substrate 3, for example.

We herein present, as the resin 5, a resin that is cured byelectromagnetic waves in a predetermined wavelength, more specifically,an ultraviolet curing resin. Also, we present a substrate made of glass,PET resin, etc. as the substrate 3.

Also, the fine transfer pattern 9 is formed by, for example, repeatedfine irregularities, as illustrated in FIG. 19B. In the irregularities,their dimensions of widths B1, B2 and height H1 are larger than or ofthe same level as the wavelength of the visible light, or smaller thanthe wavelength of the visible light, for instance, about a fraction ofthe wavelength of the visible light. In other words, the dimensions ofwidths B1, B2 and height H1 are about from a fraction to several timesof the wavelength of the visible light. In addition, an aspect ratio ofthe irregularities (i.e. H1/B1 or H1/B2) is, for example, about 1 to 2.

For convenience of explanation, we now assume one predeterminedhorizontal direction as an X-direction, another predetermined horizontaldirection orthogonal to the X-direction as a Y-direction, and adirection orthogonal to the X-direction and the Y-direction as aZ-direction (vertical direction). Furthermore, one side in theX-direction is defined as a front side, while the other side in theX-direction is defined as a rear side.

Here, the transfer operation will be described with reference to FIG.19A to 19D.

The transfer operation is carried out by first curing the resin 5 undercondition that the mold 7 is being pressed against an uncured resin 5 onthe substrate 3 and thereafter peeling off the mold 7 from the curedresin 5.

More specifically, it is first performed to press the mold 7 against thesubstrate 3 (see FIG. 19B) on which an uncured ultraviolet curing resin5 in the form of a thin film is provided on a substrate upper surface(see FIG. 19A).

Under the condition of pressing the mold 7 against the substrate 3, theuncured ultraviolet curing resin 5 is filled in the transfer pattern 9of the mold 7. It is noted in the condition illustrated in FIG. 19B, theleading end (lower end) of the transfer pattern 9 is slightly separatedfrom the upper surface of the substrate 3, so that the uncuredultraviolet curing resin 5 (thickness: T1) enters between the transferpattern 9 and the substrate 3. Preferably, the value of the thickness T1is “0”, however, this is extremely difficult.

Subsequently, in the condition illustrated in FIG. 19B, the uncuredultraviolet curing resin 5 is irradiated with ultraviolet light throughat least one of the substrate 3 and the mold 7 to cure the ultravioletcuring resin 5.

Then, from the state illustrated in FIG. 19B, it is performed to peeloff the mold 7 from the resin 5. As a result, there is remained thecured ultraviolet curing resin 5 on the substrate 3 (see FIG. 19C). Onthe cured ultraviolet curing resin 5, there is transferred the transferpattern 9 having a predetermined configuration (pattern).

In the condition illustrated in FIG. 19C, a residual film 11 is presenton the substrate 3. The residual film 11 results from curing of theresin 5 of thickness T1 illustrated in FIG. 19B.

In the structure illustrated in FIG. 19C, then, it is performed toremove the residual film 11 by ashing. Consequently, with the removal ofthe residual film 11, there is obtained a condition illustrated withFIG. 19D where the upper surface of the substrate 3 is partially exposedon the upside of the substrate 3.

As illustrated in FIG. 1 and the like, the transfer apparatus 1 includesa substrate installation part 13, a coating part 15, a mold installationpart 17, a mold pressing part 19, a resin curing part 21 and a moldpeeling part 23.

In the substrate installation part 13, the substrate 3 is positioned andinstalled integrally with the substrate 3. The coating part 15 isadapted so as to coat the uncured ultraviolet curing resin 5 on theupper surface of the substrate 3 installed on the substrate installationpart 13. Since the coating part 15 applies the uncured ultravioletcuring resin 5 on the substrate 3, there is obtained an arrangementillustrated in FIG. 19A.

In the mold installation part 17, there is installed a sheet-like mold 7having the transfer pattern 9 arranged on one surface in the thicknessdirection.

The mold pressing part 19 performs to press the mold 7 installed in themold installation part 17 against the uncured ultraviolet curing resin 5on the upper surface of the substrate 3. With the mold pressing part 19pressing the mold 7 against the ultraviolet curing resin 5 of thesubstrate 3, there is realized a situation illustrated in FIGS. 19B and18C.

The resin curing part 21 performs to cure the uncured ultraviolet curingresin 5 against which the mold 7 is pressed. The mold peeling part 23performs to peel off the mold 7 from the cured resin 5. With the mold 5peeled off from the cured resin 5, there is realized a situationillustrated in FIG. 19C.

As illustrated in FIGS. 1, 22, and the like, the substrate installationpart 13 includes a substrate installation body 25 and holds thesubstrate 3, for example, by means of vacuum sucking. The substrateinstallation body 25 is foamed, on its upper surface (for example, arectangular planar upper surface), with a loop (for example,rectangular) groove 27 for vacuum sucking. The groove 27 is formed by aportion recessed from the upper surface of the substrate placement body25.

The groove 27 is provided with an air suction hole 29 for sucking air.The air suction hole 29 is connected to a vacuum pump (not illustrated)on the underside of the substrate placement body 25. The substrate 3installed in the substrate installation part 13 has a thicknessdirection identical to the vertical direction, so that the bottomsurface of the substrate 3 is in surface contact with the top surface ofthe substrate installation body 25.

As illustrated in FIGS. 22A and 22B, when viewing the substrate 3 in theform of a rectangular flat plate installed in the substrate installationpart 13 in the Z-direction, the substrate 3 is positioned inside thesubstrate installation body 25, and the groove 27 is located inside thesubstrate 3. The groove 27 is positioned in the vicinity of the outercircumference of the substrate 3.

Then, by lowering the air pressure in the groove 27, the substrate 3 issecured to the substrate installation body 25. In this state, as the airpressure is almost “0” at the inside (rectangular portion) of the groove27 when viewed from the Z-direction, the substrate 3 is held with arelatively strong force.

The coating part 15 discharges the uncured ultraviolet curing resin 5 inthe form of fine particles from an inkjet head 31 to form a thin film ofthe uncured ultraviolet curing resin 5 on the substrate 3 installed inthe substrate installation part 13. The inkjet head 31 includes aplurality of juxtaposed nozzles for discharging the uncured ultravioletcuring resin 5 in the form of fine particles. The inkjet head 31 isslightly separated from the substrate 3 while being located above thesubstrate 3 installed in the substrate installation part 13.

The inkjet head 31 is composed of a plurality of inkjet heads (31A, 31B,31C and 31D). In order to allow the substrate 3 in the substrateinstallation part 13 to be coated with the uncured ultraviolet curingresin 5 having a pattern as a target, the respective inkjet heads 31 arearranged in a staggered manner, as illustrated in FIG. 5 and the like.

When the situation where the uncured ultraviolet curing resin 5 coatedon the substrate 3 exhibits a target pattern is viewed in theZ-direction, it is seen that the uncured ultraviolet curing resin 5 isformed into, for example, a rectangular shape slightly smaller than thesubstrate 3 and also positioned inside the substrate 3 although it isnot illustrated in the figure. In connection, the substrate 3 may beprovided, on its entire upper surface, with the uncured ultravioletcuring resin 5.

Additionally, the arrangement of the inkjet heads 31 (31A, 31B, 31C, and31D) in a staggered manner prevents voids from being formed in thecoated uncured ultraviolet curing resin 5.

That is, it is prevented that, in view of the Z-direction, the uncuredultraviolet curing resin 5 is absent in part of the upper surface of thesubstrate 3 (for example, a central portion of the substrate 3; theportion surrounded by the uncured ultraviolet curing resin 5), therebycausing the substrate 3 to be exposed (namely, it is prevented that theuncured ultraviolet curing resin 5 does not form a targeted pattern).

Or, it is prevented that the uncured ultraviolet curing resin 5 whichoriginally ought to form one continuous target pattern is divided intotwo or more portions (namely, it is prevented that the uncuredultraviolet curing resin 5 does not form a target pattern).

A casing 33 of each inkjet head 31 is formed into a rectangularparallelepiped shape, and its dimension in the Y-direction is largerthan the dimension in the X-direction. The inkjet head 31 is adapted soas to discharge the uncured ultraviolet curing resin 5 from the bottomsurface of the casing 33 toward the lower side.

In each inkjet head 31, as illustrated in FIG. 5, a resin dischargingportion 35 for discharging the resin 5 is formed into an elongatedrectangular shape. In view of the Z-direction, the resin dischargingportion 35 has its longitudinal direction identical to the Y-direction.Inside the casing 33 of the inkjet head 31, the resin dischargingportion 35 is located in a central portion of the casing 33.

The respective inkjet heads 31 (31A, 31B, 31C, and 31D) are aligned inthe Y-direction and also shifted from each other in the X-directionalternately. In arrangement, one inkjet head 31 and the adjacent inkjethead 31 are arranged so that a longitudinal end of the resin dischargingportion 35 of the former inkjet head 31 overlaps the other longitudinalend of the resin discharging portion 35 of the latter (adjacent) inkjethead 31 (see a portion of L1 in FIG. 5).

More specifically, the first inkjet head 31A positioned at one end inthe Y-direction is arranged so that the longitudinal direction of theresin discharging portion 35 (or the casing 33 of the inkjet head)coincides with the Y-direction. Also, the second inkjet head 31Badjacent to the first inkjet head 31A is arranged so that thelongitudinal direction of the resin discharging portion 35 coincideswith the Y-direction and slightly departs from the first inkjet head 31Ato the rear side in the X-direction.

In view of the Z-direction, it is obvious that the resin dischargingportion 35 of the first inkjet head 31A and the resin dischargingportion 35 of the second inkjet head 31B are slightly separated fromeach other in the X-direction and additionally, one end of the resindischarging portion 35 of the first inkjet head 31A (one end: on theside of the second inkjet head 31B) and one end portion of the resindischarging portion 35 of the second inkjet head 31B (one end: on theside of the first inkjet head 31A) overlap each other in theY-direction.

The third inkjet head 31C adjacent to the second inkjet head 31B isarranged so that the longitudinal direction of the resin dischargingportion 35 coincides with the Y-direction and departs from the secondinkjet head 31B slightly in the X-direction. Also in the X-direction,the third inkjet head 31C is located at the same position as the firstinkjet head 31A.

Again, in view of the Z-direction, it is obvious that the resindischarging portion 35 of the second inkjet head 31B and the resindischarging portion 35 of the third inkjet head 31C are slightlyseparated from each other in the X-direction. Also in the Y-direction,one end of the resin discharging portion 35 of the second inkjet head31B (one end: on the side of the third inkjet head 31C) and one endportion of the resin discharging portion 35 of the third inkjet head 31C(one end: on the side of the second inkjet head 31B) overlap each other.The fourth inkjet head 31D is also arranged in the above-describedmanner.

With the above-mentioned arrangement of the respective inkjet heads 31(31A, 31B, 31C, and 31D), they are arranged in a staggered manner. It isnoted that they are inkjet heads of, for example, the same specificationand are positioned at the same level in the Z-direction.

In the above-mentioned arrangement, the coating part 15 is provided withfour inkjet heads 31. Alternatively, it may be provided with two orthree inkjet heads 31. Further, the coating part 15 may be provided withfive or more inkjet heads 31. Also in this case, the respective inkjetheads 31 are arranged in a staggered manner.

With the arrangement of the inkjet heads 31 in a staggered manner, wheneach of the inkjet heads 31 is moved relatively to the substrate 3installed in the substrate installation part 13 in the X-direction whiledischarging the uncured ultraviolet curing resin 5 through the inkjetheads 31, the substrate 3 can be easily coated with coat the ultravioletcuring resin 5 in the form of a thin film without producing anyinterruption.

Under control of a control unit 41 (see FIG. 1) including a CPU 37 and amemory 39, it may be executed to establish one or more inkjet heads 31for ejecting the uncured ultraviolet curing resin 5 and one or moreinkjet heads 31 that do not eject the uncured ultraviolet curing resin 5in accordance with the size of the substrate 3 (e.g. a substrate'sdimension in the Y-direction) installed in the substrate installationpart 13.

In the above description, the uncured ultraviolet curing resin 5 isapplied on the substrate 3 with a constant thickness. Nevertheless, theuncured ultraviolet curing resin 5 may be applied on the substrate 3with an appropriately-varying thickness, as illustrated in FIG. 20,

That is, with the coating part 15 controlled in operation by the controlunit 41, the uncured ultraviolet curing resin 5 may be applied to thesubstrate 3 with a pattern corresponding to (or similar to) the finetransfer pattern 9 formed on the mold 7.

More specifically, in advance of transferring a fine transfer pattern 9formed on the mold 7 to the uncured ultraviolet curing resin 5 appliedto the substrate 3, the ultraviolet curing resin 5 may be formed into ashape corresponding to the fine transfer pattern 9 in order to reduce agap produced between the leading end of the transfer pattern 9 andsubstrate 3, thereby thinning the residual film 11 formed by the resin 5entering this gap.

When explanation is made by an example, the fine transfer pattern 9 isformed into a line-and-space shape. That is, in view of the Y-direction,the fine transfer pattern 9 has a rectangular wave shape whererectangular projections and rectangular recesses are repeatedalternately (see FIG. 19B). In this case, the uncured ultraviolet curingresin 5 coated on the substrate 3 is formed into a corrugated shape.

In view of the Y-direction, for example, the uncured ultraviolet curingresin 5 is formed in a waveform shape where thickly coated portions andthinly coated portions are repeated alternately, as illustrated in FIG.20. In this waveform shape, for example, the pitch of the wave is setlarger than the wave height (i.e. a difference between the maximumthickness and the minimum thickness of the resin 5) and additionally,the wave height is larger than the minimum thickness of the resin 5.

When transferring in the above-mentioned arrangement of the uncuredultraviolet curing resin 5, the mold 7 is pressed against the resin 5 sothat the rectangular convex portions of the transfer pattern 9 enterinto the thinly coated portions of the resin 5, while the thickly coatedportions of the resin 5 enter into the rectangular concave portions ofthe transfer pattern 9.

By coating the uncured ultraviolet curing resin 5 as illustrated in FIG.20, it is possible to reduce the residual film 11 illustrated in FIG.19C.

In the modification, additionally, the thickness of the uncuredultraviolet curing resin 5 applied to the substrate 3 before thetransfer operation may be changed in the X-direction. For example, inorder to eliminate or reduce the surplus resin at the end of transfer(i.e. when the pressing of the mold 7 against the resin 5 on thesubstrate 3 is completed), the uncured ultraviolet curing resin 5 may beformed to be thick on one substrate side where the pressing is started(i.e. the right side of FIGS. 19A and 18A) while the resin 5 is formedto be thin on the other substrate's side where the pressing is ended(i.e. the left side of FIGS. 19A and 18A). The details ofroll-transferring illustrated in FIGS. 18A to 18C will be describedlater.

Alternatively, the thickness of the uncured ultraviolet curing resin 5applied to the substrate 3 before the transfer operation may be changedin the Y-direction. For example, in order to avoid the shortage of theresin 5 at the central portion of the substrate 3 during the transferoperation, the resin 5 may be formed so that its thickness becomes thickat the central portion of the substrate 3 in the Y-direction and alsobecomes thin at the marginal portions of the substrate 3 in theY-direction.

Next, the mold installation part 17, the mold pressing part 19 and themold peeling part 23 of the transfer apparatus will be described.

As illustrated in FIGS. 2 to 4, the mold installation part 17 includes arolled web mold installation part (delivering roll installation part) 45for installing a rolled web mold (web roll) 43 around which theelongated mold 7 having a predetermined width (in the Y-direction) iswound and a winding roll installation part 49 for installing a windingroll 47 for winding up the mold 7 fed out from the rolled web mold (webroll) 43 installed in the rolled web mold installation part 45.Incidentally, FIG. 2 intentionally omits the mold 7 in view of avoidingrespective components from being difficult to be seen for theircomplexity.

Between the rolled web mold 43 installed in the rolled web moldinstallation part 45 and the winding roll 47 installed in the windingroll installation part 49, the mold 7 is stretched with a predeterminedtension. As a result, in this segment, the mold 7 always extends in theform of a flat plate having no slackening.

With the appropriate rotation of the rolled web mold 43 and the windingroll 47, the mold 7 extending between the rolled web mold 43 and thewinding roll 47 moves from the rolled web mold 43 to the winding roll 47while maintain its state producing no slackening, and conversely, movesfrom the winding roll 47 to the rolled web mold 43.

As illustrated in FIGS. 1, 2, and 18A to 18C, the mold pressing part 19and the mold peeling part 23 include a transfer roller 51. Wound aroundthis transfer roller 51 is the mold 7 that extends between the rolledweb mold 43 installed in the rolled web mold installation part 45 andthe winding roll 47 installed in the winding roll installation part 49.

By the roll-transferring using the transfer roller 51, it is performedto press the mold 7 against the uncured ultraviolet curing resin 5 andsubsequently peel off the mold 7 from the cured ultraviolet curing resin5, in the transfer operation.

The roll-transferring is accomplished by moving the transfer roller 51relatively to the substrate 3 from its one end (rear end) toward theother end (front end) in the X-direction while pressing the mold 7against the substrate 3 and the uncured ultraviolet curing resin 5 inthe form of a thin film coated on the substrate 3 by the use of thetransfer roller 51 around which the mold 7 is wound (see FIGS. 18A to18C).

More specifically, with the movement of the transfer roller 51(aroundwhich the mold 7 is wound) in relation to the substrate 3 (installed inthe substrate installation part 13) to the front side in the X-direction(the left side of FIG. 18A) at a constant speed, the situation of thetransfer apparatus is changed from the state of FIG. 18A to the state ofFIG. 18C through the state of FIG. 18B, so that the pressing of the mold7 is completed.

After curing the ultraviolet curing resin 5 with the resin curing part21 in the state of FIG. 18C, it is performed to move the transfer roller51 (around which the mold 7 is wound) in relation to the substrate 3(installed in the substrate installation part 13) to the rear side inthe X-direction (the right side of FIG. 18C), for example, at a constantspeed. In this way, the peeling of the mold 7 is completed.

At this time, the transfer roller 51 is urged toward the substrate 3(i.e. the lower side) by an actuator (not illustrated) such as apneumatic cylinder. Further, regardless of the position of the transferroller 51 brought by the movement of the transfer roller 51, the mold 7extends between the rolled web mold 43 installed in the rolled web moldinstallation part 45 and the winding roll 47 installed in the windingroll installation part 49, in the form of a flat plate having noslackening.

As illustrated in FIGS. 1, 18, and the like, the transfer apparatus 1 isprovided with the resin curing part 21 (for example, an ultraviolet raygenerator 53). Under the condition of pressing the mold 7 against theultraviolet curing resin 5, the ultraviolet ray generator 53 irradiatesthe ultraviolet curing resin 5 with ultraviolet light to cure theultraviolet curing resin 5.

The ultraviolet ray generator 53 is located slightly away from thetransfer roller 51 on the rear side of the transfer roller 51 in theX-direction. In the Z-direction, the ultraviolet ray generator 53 ispositioned above the mold 7 extending in the X-direction on the rearside of the transfer roller 51 and also located slightly away from themold 7.

Then, the ultraviolet ray generator 53 generates ultraviolet raysdownward. As a result, the so-generated ultraviolet rays are irradiatedonto the ultraviolet curing resin 5 on the substrate 3 through the mold7.

When viewing an area of ultraviolet rays generated from the ultravioletray generator 53 in the Z-direction, the area of ultraviolet rays isseen so as to extend long in the Y-direction (not illustrated). As aresult, with the movement of the ultraviolet ray generator 53 inrelation to the substrate 3 installed in the substrate installation part13 in the X-direction, all of the ultraviolet curing resin 5 on thesubstrate 3 (i.e. resinous part against which the transfer pattern 9 ispressed) is cured.

Further, in the transferring apparatus 1, when the transfer roller 51 ismoving in the direction (forward direction) to press the mold 7 againstthe ultraviolet curing resin 5 under control of the control unit 41 andwhen the transfer roller 51 is moving in the direction (backwarddirection) to peel off the mold 7 from the resin 5, the ultraviolet raygenerator 53 irradiates the ultraviolet curing resin 5 with ultravioletrays.

That is, during the roll-transferring operation, when the transferroller 51 is moving (pressing the mold 7) in the direction (front side)to increase the pressing area of the mold 7 against the ultravioletcuring resin 5 (i.e. when the resin 5 is pressed by mold 7) and when thetransfer roller 51 is moving in the direction (rear side) to decreasethe pressing area of the mold 7 against the ultraviolet curing resin 5(i.e. when the mold 7 is peeled off from the resin 5), the ultravioletray generator 53 irradiates the ultraviolet curing resin 5 withultraviolet rays.

In other words, when the transfer roller 51 reciprocates, theultraviolet ray generator 5 irradiates the ultraviolet curing resin 5with ultraviolet rays. In connection, the ultraviolet ray generator 53may be configured so as to irradiate the ultraviolet curing resin 5 withultraviolet rays only when the transfer roller 51 is moving to the frontside or when the transfer roller 51 is moving to the rear side.

In order to prevent sink marks from occurring in the ultraviolet curingresin 5, the transfer apparatus 1 is constructed so that the controlunit 41 adjusts the intensity of ultraviolet rays (i.e. altering of theirradiation pattern) emitted from the ultraviolet ray generator 53 tothe ultraviolet curing resin 5 in accordance with the displacement ofthe transfer roller 51 during the roll-transferring operation.

Here, the sink marks will be described specifically. The ultravioletcuring resin 5 is sometimes shrinked as being cured. If a volumereduction due to this shrinkage is not supplied with the uncuredultraviolet curing resin 5, a defect also called “sink marks” is causedin a pattern formed on the ultraviolet curing resin 5 by the transferpattern 9 of the mold 7.

In order to prevent an occurrence of sink marks, for example, it isperformed to coat the uncured ultraviolet curing resin 5 on a region (aregion of the substrate 3) whose area is only one round larger than thearea of the transfer pattern 9 formed in the mold 7. Then, the volumereduction due to the shrinkage of the ultraviolet curing resin 5 iscompensated by allowing the uncured ultraviolet curing resin 5 tonaturally and slightly flow from the circumference of the region coatedwith the uncured ultraviolet curing resin 5 while ensuring that acentral portion of the region coated with the uncured ultraviolet curingresin 5 is cured at first. The curing of the uncured ultraviolet curingresin 5 proceeds from the central portion of the region coated with theuncured ultraviolet curing resin 5 toward the circumferential portion ofthe region.

For instance, as illustrated in FIG. 22A, when pressing the mold 7against the resin 5, the irradiation of ultraviolet rays may be startedfrom a point of time of passing through a center line L2 (on the frontside of the center line L2 as illustrated with an arrow A1), and whenpeeling off the mold 7 from the resin 5, the irradiation of ultravioletrays may be started from a point of time of passing through the centerline L2 (on the rear side of the center line L2 as illustrated with anarrow A2). Consequently, since there is no possibility that the centralportion of the ultraviolet curing resin 5 is not cured at the end, theoccurrence of sink marks in the ultraviolet curing resin 5 is prevented.

In this case, the intensity of ultraviolet rays is constant irrespectiveof passage of time (regardless of the position of the transfer roller 51in the X-direction) and furthermore, the intensity of ultraviolet raysis also constant irrespective of the position of the transfer roller 51in the Y-direction (i.e. the position of the ultraviolet ray area by theultraviolet ray generator 53 in the longitudinal direction).Incidentally, the center line L2 may be biased to either the left or theright of FIG. 22A.

Further, by appropriately changing the intensity of ultraviolet rays inthe Y-direction or in accordance with the position of the ultravioletray generator 53 in the X-direction, it may be executed to cause theultraviolet curing resin 5 to be cured from the central portion of thesubstrate 3 toward the outside, as illustrated in FIG. 22B.

The ultraviolet ray generator 53 includes, for example, a number ofLED-type small UV lamps which are arranged linearly in the Y-directionand illuminances of which are controlled by the control unit 41.Consequently, the light source of the ultraviolet ray generator 53extends in the Y-direction, in the form of a single straight line.

Provided that the UV lamps in the form of a straight lime are formed bya plurality of blocks each including a plurality of UV lamps gathered ina block, the ultraviolet ray generator 53 may be configured so as toenable the illuminances of the lamps to be controlled (adjusted) foreach block. For example, respective blocks are arranged linearly in theY-direction.

Although the plurality of UV lamps are arranged to form a row in theabove explanation, they may be arranged so as to constitute plural rows,such as two rows in the modification (The respective rows may bejuxtaposed at a very small interval in the X-direction.). In this case,it is desirable that the plurality of UV lamps are staggered in planarview (in view of the Z-direction) since the UV lamps in respective rowsare shifted from each other in the Y-direction.

Further, the control unit 41 may be configured to control the coatingpart 15 so that the amount of the uncured ultraviolet curing resin 5 canbe adjusted according to the transfer pattern 9 formed on the mold 7.Moreover, the control unit 41 may be configured to control the resincuring part 21 so that the intensity of ultraviolet light (or theirradiation amount) can be adjusted according to the amount of theuncured ultraviolet curing resin 5 coated on the mold 7.

Here, the control of the coating part 15 and the control of the resincuring part 21 will be described with examples. FIGS. 24A and 24B areviews illustrating an example of a molded product 103, which correspondto FIG. 19D. The transfer pattern 9 of the molded product 103 has asomewhat complicated shape. In planar view, the molded product 103includes a number of large convex parts 105 which are made of the curedultraviolet curing resin 5 and which are arranged at a central portionof the substrate 3 at predetermined intervals (also forming a pattern105B composed of large-volume columns, for example).

Additionally, the molded product 103 also includes a plurality of smallconvex parts 105 which are made of the cured ultraviolet curing resin 5which are arranged at a peripheral portion of the substrate 3, atpredetermined intervals equal to those of the large convex parts 105(also forming a pattern 105A composed of small-volume columns, forexample).

In producing the molded product 103 illustrated in FIGS. 24A and 24B, ifthe uncured ultraviolet curing resin 5 is coated on the upper surface ofthe substrate 3 evenly (if the substrate is coated with the uncuredultraviolet curing resin 5 of an uniform thickness), the ultravioletcuring resin 5 will be short in the central portion of the substrate 3.

Therefore, when the uncured ultraviolet curing resin 5 is uniformly andthickly supplied to the surface of the substrate 3 so as to avoid such ashortage of the ultraviolet curing resin 5 in the central portion of thesubstrate 3, the uncured ultraviolet curing resin 5 will be supplied inthe peripheral portion of the substrate 3 excessively. As a result, whentransfer is performed, the residual film 11 (see FIG. 19C) getsincreased in the peripheral portion of the substrate 3, therebyrequiring great time and effort to remove the residual film 11.Additionally, the amount of ultraviolet curing resin 5 for use will beincreased.

In order to solve such inconveniences, the control unit 41 controls thecoating amount in the coating part 15 so that the uncured ultravioletcuring resin 5 is supplied to the central portion of the substrate 3more (thicker) than the uncured ultraviolet curing resin 5 supplied tothe peripheral portion of the substrate 3. Consequently, it is possibleto supply the entire transfer pattern with the ultraviolet curing resin5 appropriately without its excess or deficiency.

Further, the transfer pattern may be divided into a plurality ofportions (for example, nine equal portions) in planar view, and theamount of necessary resin 5 may be calculated and supplied with respectto each divided portion.

When producing the molded product 103 provided with the transfer pattern(the plurality of convex parts 105) as illustrated in FIGS. 24A and 24Bby curing the uncured ultraviolet curing resin 5 with use of theultraviolet ray generator 53, irradiation of ultraviolet rays having auniform intensity (uniform ultraviolet dose) may cause the occurrence offaults.

That is, if the ultraviolet rays whose intensity allows the ultravioletcuring resin 5 in the peripheral portion of the substrate 3 to be curedare irradiated, the ultraviolet rays are too weak at the central portionof the substrate 3, so that insufficient curing of the ultravioletcuring resin 5 occurs. On the other hand, if the ultraviolet rays whoseintensity is enough to sufficiently cure the ultraviolet curing resin 5in the central portion of the substrate 3 are irradiated, theultraviolet curing resin 5 is cured in the peripheral portion of thesubstrate 3 earlier, so that the uncured ultraviolet curing resin 5 isnot supplied from the peripheral portion of the substrate 3 toward thecentral portion, thereby producing sink marks.

In order to solve such inconveniences, the control unit 41 is adapted soas to control the irradiation dose (intensity) of ultraviolet raysaccording to the coating amount of the ultraviolet curing resin 5. As aresult, it is possible to improve the quality of the molded product 103.

In producing the molded product 103 having a transfer pattern asillustrated in FIGS. 24A and 24B, it is performed to reduce theirradiation dose of ultraviolet rays at the peripheral portion of thesubstrate 3 while increasing the irradiation dose of ultraviolet rays atthe central portion of the substrate 3. Alternatively, it may beperformed to irradiate ultraviolet rays only at the central portion ofthe substrate 3 when the ultraviolet ray generator 53 moves forward andalso performed to irradiate ultraviolet rays of uniform intensity to theentire substrate 3 when the generator 53 moves backward.

Further, the irradiation dose of ultraviolet rays to the ultravioletcuring resin coated on the substrate 3 may be controlled byappropriately adjusting the moving speed of the ultraviolet raygenerator 53 in the X-direction.

Also, the transfer apparatus 1 is provided with a plasma unit 55. Theplasma unit 55 irradiates plasma onto the fine transfer pattern 9provided on the mold 7 peeled off from the resin 5 of the substrate 3after transferring. Incidentally, the plasma irradiation by the plasmaunit 55 is performed to clean the fine transfer pattern 9 provided onthe mold 7.

The plasma unit 55 includes a head 57 and a driver 59. Then, atmosphericpressure plasma (AP plasma) is generated from the head 57, and thegenerated atmospheric pressure plasma is irradiated to the mold 7 todecompose and remove contamination of the fine transfer pattern 9 andthe like of the mold 7.

The irradiation of plasma to the mold 7 may be performed each time whenone transfer operation is completed or may be performed each time whenplural transfer operations are completed.

In the transfer apparatus 1, if the fine transfer pattern 9 of the mold7 is cleaned by the plasma unit 55 insufficiently, a portion of the mold7 peeled off from the ultraviolet curing resin 5 and irradiated withplasma is wound up by the winding roll 47, while a new unused portion ofthe mold 7 is unwound from the rolled web mold 43. The newly-deliveredunused portion of the mold 7 is used for the next transfer operation.

By the plasma unit 55, plasma is also irradiated on the upper surface ofthe substrate 3 before the uncured ultraviolet curing resin 5 isinstalled. The plasma irradiation on the upper surface of the substrate3 is performed to improve the wettability of the substrate 3.

The coating part 15 is configured so as to coat the uncured ultravioletcuring resin 5 in the form of a thin film on the substrate 3 with themovement of the inkjet head 31 from one end to the other end of thesubstrate 3 in the X-direction. The plasma unit 55 (the head 57 and thedriver 59) is supported by the coating part 15.

The transfer apparatus 1 includes a mold installation assisting part 61.The mold installation assisting part 61 is configured so as to wind themold 7, which has been fed out from the rolled web mold 43 installed inthe rolled web mold installation part 45, around the transfer roller 51and further guide the mold 7 up to the winding roll 47 installed in thewinding roll installation part 49. While suppressing the occurrence ofwrinkles in a mold 7 fed out from the rolled web mold 43, this guidingis performed under condition that the fed-out mold 7 is substantiallystretched, for example.

More specifically, in the mold 7 before being installed in the transferapparatus 1, a major portion on one end side in the longitudinaldirection of the mold 7 is wound around a core material 63 of the rolledweb mold 43, as illustrated in FIG. 13. Again, in the mold 7 beforebeing installed in the transfer apparatus 1, a minor portion on theother end side in the longitudinal direction of the mold 7 extends fromthe rolled web mold 43, and a further leading portion of the extendedsmall portion of the mold 7 is installed in a molding supporting part 65integrally. Although the mold supporting part 65 is separate from thecore material 67 of the winding roll 47, the mold supporting part 65 maybe formed by the core material 67 of the winding roll 47.

The mold installation assisting part 61 includes a mold installationassisting member 69 that is movable relatively to the rolled web moldinstallation part 45, the transfer roller 51, and the winding rollinstallation part 49. The mold supporting part 65 is installed in themold installation assisting member 69 integrally. Then, with themovement of the mold installation assisting member 69 and the moldsupporting part 65 installed in the mold setting assisting member 69,the above-described guiding is accomplished.

The transfer apparatus 1 will be further described below.

As illustrated in FIG. 1 and the like, the transfer apparatus 1 includesa base body 71 having an upper surface, for example, a flat surface. Thesubstrate installation body 25 is provided on the upper surface of thebase body 71 integrally. In both the X-direction and the Y-direction,the substrate installation body 25 is positioned in the middle part ofthe base body 71.

Further, the transfer apparatus 1 includes a first supporting body 73, asecond supporting body 75, and a third supporting body 77.

The first supporting body 73 stands upward from the upper surface of thebase body 71. The first supporting body 73 is supported to the base body71 by linear guide bearings (not illustrated) and configured so as to bemovable and positionable in relation to the base body 71 in theX-direction by an actuator (not illustrated) such as a servomotor.

The first supporting body 73 carries the inkjet head 31, the head 57 ofthe plasma unit 55, and the driver 59. The inkjet head 31 is providedintegrally with the first supporting body 73.

In the X-direction, the inkjet head 31 is located on the rear side ofthe first supporting body 73. The head 57 of the plasma unit 55 islocated on the rear side of the inkjet head 31 in the X-direction.

In the Z-direction, the inkjet head 31 and the head 57 of the plasmaunit 55 are located above the substrate 3 installed in the substrateinstallation part 13.

The driver 59 of the plasma unit 55 is mounted on the first supportingbody 73 integrally.

In an initial state, the first supporting body 73, the inkjet head 31and the head 57 of the plasma unit 55 are located in the vicinity of thefront end portion of the base body 71 in the X-direction. The inkjethead 31 and the head 57 of the plasma unit 55 are adapted so as to bemovable from their respective positions in the initial state up torespective positions (see FIG. 8) on the rear side of the substrateinstallation body 25.

Further, the head 57 of the plasma unit 55 is supported by the firstsupporting body 73 so as to be movable and positionable in theZ-direction. The head 57 is also adapted so as to be rotatable about anaxis C1 extending in the Y-direction and rotationally positioned with apredetermined angle, for example, 90 degrees.

By this rotational positioning, the direction in which plasma isgenerated can be switched between the rear side in the X-direction andthe lower side in the Z-direction.

The inkjet head 31 may be supported by the first support 73 so as to bemovable and positionable in the Z-direction.

The second supporting body 75 stands upward from the upper surface ofthe base body 71. The second supporting body 75 is supported to the basebody 71 by linear guide bearings (not illustrated) and configured so asto be movable and positionable in relation to the base body 71 in theX-direction by an actuator (not illustrated) such as a servomotor. Asillustrated in FIGS. 2, 3, and 4, the second supporting body 75 isengaged with the base body 71 only on its one side in the Y-direction.

The second support 75 is provided with the rolled web mold installationpart 45 and carries the transfer roller 51 and the ultraviolet raygenerator 53.

In the Z-direction, the transfer roller 51 and the ultraviolet raygenerator 53 are positioned above the substrate 3 installed in thesubstrate installation part 13. In the Z-direction, the rolled web moldinstallation part 45 is positioned above the transfer roller 51 and theultraviolet ray generator 53.

In the X-direction, for example, the rolled web mold installation part45, the transfer roller 51 and the ultraviolet ray generator 53 are alllocated inside the second supporting body 75. In the X-direction, therolled web mold installation part 45 and the transfer roller 51 arepositioned on the front side of the second supporting body 75, while theultraviolet ray generator 53 is positioned behind the transfer roller 51at a small distance.

In the initial state, the second support body 75 is located on the rearside from the substrate installation body 25 (see FIG. 1). In operation,the second support body 75 is movable from the initial position up to aposition (see FIG. 11) where the ultraviolet ray generator 53 ispositioned in front of the substrate installation body 25, in theX-direction.

The cylindrical transfer roller 51 is rotatably supported on the secondsupporting body 75 with the central axis of the transfer roller 51 (acentral axis extending in the Y-direction) as the rotation center. Owingto an actuator, such as a servo motor, the transfer roller 51 can rotateat a predetermined torque or rotational speed and also suspend in apredetermined rotational position.

When pressing the mold 7 against the resin 5 of the substrate 3 orpeeling off the mold 7 from the resin 5, the transfer roller 51 rotatesat a rotation speed synchronized with the moving speed of the transferroller 51 in the X-direction in order to prevent the occurrence of aslippage of the roller 51 on the mold 7. Incidentally, the transferroller 51 may be adapted so as to rotate following the movement speed ofthe transfer roller 51 in the X-direction without using an actuator.

The transfer roller 51 is movable in relation to the second supportingbody 75 in the Z-direction. Separately from the transfer roller 51 ortogether with the roller 51, for example, the ultraviolet ray generator53 is also movable in relation to the second supporting body 75 in theZ-direction and adapted so as to occupy either an upper end position ora lower end position.

As illustrated in FIGS. 1 and 4, the rolled web mold installation part45 includes a columnar first shaft member 79. The first shaft member 79protrudes from the second supporting body 75 on the other end side inthe Y-direction. That is, the first shaft member 79 is provided on thesecond supporting body 75 in a cantilevered manner. Further, the shaftmember 79 is rotatably supported on the second supporting body 75 aboutthe central axis of the first shaft member 79 (a central axis extendingin the Y-direction) as the rotation center. Owing to an actuator, suchas a servo motor, the shaft member 79 can rotate at a predeterminedtorque or rotational speed and suspend in a predetermined rotationalposition. The shaft member 79 can stop its rotation with a predeterminedtorque.

The core material 63 of the rolled web mold 43 is formed in acylindrical shape. With the first shaft member 79 penetrating through acylinder of the core material 63, the rolled web mold 43 is installed onthe first shaft member 79 integrally. The rolled web mold 43 is adaptedso as to be easily attachable and detachable to and from the first shaftmember 79 in the form of a cantilever.

In the rolled web mold 43, as illustrated in FIG. 23, since a slip sheet81 is inserted between the overlapped molds 7, they are prevented frombeing damaged or injured. The slip sheet 81 which is no longer neededsince the mold 7 extends from the rolled web mold 43 is wound up by aslip sheet winding roll 83 provided on the second supporting body 75, asillustrated in FIG. 1 and the like. The ship sheet 81 wound by the slipsheet winding roll 83 is extended from the slip sheet winding roll 83again as necessary.

The third supporting member 77 also stands upward from the upper surfaceof the base body 71 and is provided integrally with the base body 71. Asillustrated in FIGS. 2 and 3, the third supporting body 77 is alsoengaged with the base body 71 only on its one side in the Y-direction.

The third supporting body 77 is provided with the winding rollinstallation part 49 and also carries the guide roller 85.

In the Z-direction, the position of the lower end of the guide roller 85coincides with the position of the lower end of the transfer roller 51when the mold 7 is pressed against the resin 5 of the substrate 3installed in the substrate installation part 13. Thus, when the mold 7is pressed against the resin 5 of the substrate 3 installed in thesubstrate installation part 13, a portion of the mold 7 extendingbetween the guide roller 85 and the transfer roller 51 is due to developin the horizontal direction.

Additionally, the guide roller 85 may be adapted so as to be freelymovable and positionable in relation to the third supporting body 77 inthe Z-direction according to the thickness of the substrate 3 or thelike.

In the Z-direction, the winding roll installation part 49 is positionedslightly upward from the guide roller 85.

In the X-direction, the winding roll installation part 49 and the guideroller 85 are positioned, for example, inside the third supporting body77. The third supporting member 77 is located on the rear side of thesecond supporting member 75 in the X-direction.

The columnar guide roller 85 is rotatably supported on the thirdsupporting member 77 about the central axis of the guide roller 85extending in the Y-direction as the rotation center. Owing to anactuator, such as a servo motor, the guide roller 85 can rotate at apredetermined torque or rotational speed and suspend in a predeterminedrotational position.

When winding up the mold 7 by the winding roll 47 installed in thewinding roll installation part 49, the winding roll 47 rotates at arotation speed synchronized with the moving speed of the transfer roller51 in the X-direction in order to prevent the occurrence of a slippageof the winding roll 47 on the mold 7. Incidentally, the guide roller 85may be adapted so as to rotate following the winding speed of the mold 7without using an actuator.

As illustrated in FIGS. 1 to 3, the winding roll installation part 49includes a columnar second shaft member 87. The second shaft member 87protrudes from the third support body 77 on the other end side in theY-direction. That is, the second shaft member 87 is provided on thethird supporting body 77 in a cantilevered manner. Further, the secondshaft member 87 is rotatably supported on the third supporting body 77about the central axis of the second shaft member 87 extending in theY-direction, as the rotation center. Owing to an actuator, such as aservo motor, the second shaft member 87 can rotate at a predeterminedtorque or rotational speed and suspend in a predetermined rotationalposition. The second shaft member 87 can stop its rotation with apredetermined torque.

The core material 67 of the winding roll 47 is formed in a cylindricalshape. With the second shaft member 87 penetrating through a cylinder ofthe core material 67, the winding roll 47 is installed on the secondshaft member 87 integrally. The winding roll 47 is adapted so as to beeasily attachable to and detachable from the second shaft member 87.

In the winding roll 47, as illustrated in FIG. 23, the slip sheet 81 isinserted between the overlapped molds 7. In case that it is required toinsert the slip sheet 81 between the overlapping molds 7 as illustratedin FIG. 1 and the like when winding up the mold 7 with the winding roll47, the slip sheet 81 is supplied from a slip sheet supply roll 89provided on the third supporting body 77. Then, the slip sheet 81supplied from the slip sheet supply roll 89 is wound up by the slipsheet supply roll 89 again as necessary.

The mold installation assisting member 69 is arranged on the uppersurface of the base body 71 and also supported by the base body 71through linear guide bearings (not illustrated). Owing to an actuator(not illustrated) such as a servomotor, the mold installation assistingmember 69 is movable and positionable in relation to the base body 71 inthe X-direction.

When the mold installation assisting member 69 is located at the frontmost position in the X-direction (see FIG. 15), the mold installationassisting member 69 is located slightly forward of the second supportingbody 75 in the initial state and also rearward of the substrateinstallation body 25.

When the mold installation assisting member 69 is located at therearmost position in the X-direction (see FIG. 16), the moldinstallation assisting member 69 is located almost just under thewinding roll installation part 49.

In connection, the mold installation assisting member 69 may beconfigured so as to be movable and positionable in relation to the basebody 71 manually (by manpower).

As illustrated in FIG. 3 and the like, the mold installation assistingmember 69 is provided at the central portion of the base body 71 on theother end side in the Y-direction than respective engagement portions ofthe second supporting body 75 and the third supporting body 77 with thebase body 71.

As illustrated in FIG. 15 and the like, the mold installation assistingmember 69 is located slightly lower than the guide roller 85 in theZ-direction.

The mold supporting part 65 having the mold 7 extending therefrom isinstalled on the mold installation assisting member 69 integrally anddetachably.

Under the condition of installing the rolled web mold 43 in the rolledweb mold installation part 45 and also installing the mold supportingpart 65 (to which the leading end of the mold 7 extending from therolled web mold 43 is fixed) in the mold installation assisting member69, the mold 7 is wound around the transfer roller 51 and also guided upto the winding roll 47 (for example, up to the vicinity of the windingroll 47 as illustrated in FIG. 16) by moving the mold installationassisting member 69 (the mold supporting part 65) while allowing themold 7 to extend from the rolled web mold 43.

The leading end of the mold 7 extending from the rolled web mold 43 isattached to the mold supporting portion 65 by an adhesive agent or anadhesive tape.

By guiding the mold supporting part 65 in this way, the mold supportingpart 65 having the leading end of the mold 7 adhered thereto reaches thevicinity of the winding roll 47 installed in the winding rollinstallation part 49. Thereafter, when the leading end of the mold 7 ispeeled off from the mold supporting part 65 and subsequently attached tothe winding roll 47, the installation of the mold 7 in the transferapparatus 1 can be accomplished (see FIG. 17 and the like). Further, asdescribed above, the mold supporting part 65 may be adopted as the corematerial 67 of the winding roll 47.

As illustrated in FIG. 21, transfer roller guide parts 91 may beprovided at the front and back of the substrate installation body 25.

In this case, when the mold 7 is pressed against the resin 5 coated onthe substrate 3 installed in the substrate installation part 13 by themovement of the transfer roller 51, the transfer roller guide parts 91serve to guide the movement of the transfer roller 51 carrying the mold7.

Further, the transfer roller guide parts 91 may be configured so as toeliminate or mitigate a shock produced at the start of pressing the mold7 against the resin 5 coated on the substrate 3 installed in thesubstrate installation part 13 with the movement of the transfer roller51. By eliminating or mitigating the shock, it is possible to eliminatebad effects of the shock on the transfer accuracy.

That is, the transfer apparatus 1 may be configured so that the transferroller guide parts 91 serve to eliminate or mitigate the shock at thestart of pressing the mold 7 against the substrate 3 installed in thesubstrate installation part 13 with the forward movement of the transferroller 51 (i.e. a shock produced when the transfer roller 51 abruptlycomes into contact with the substrate 3 through the mold 7).

Additionally, the transfer roller guide parts 91 may be configured so asto eliminate or mitigate a shock produced at the end of pressing themold 7 against the resin 5 coated on the substrate 3 installed in thesubstrate installation part 13 with the movement of the transfer roller51 carrying the mold 7.

That is, the transfer apparatus 1 may be configured so that the transferroller guide parts 91 serves to eliminate or mitigate the shock at thestart of peeling off the mold 7 from the substrate 3 installed in thesubstrate installation part 13 with the backward movement of thetransfer roller 51 (i.e. a shock produced when the transfer roller 51abruptly comes into contact with the substrate 3 through the mold 7).

The transfer roller guide parts 91 include inclined members 93integrally provided on the front and rear sides of the substrateinstallation body 25. Each of the inclined members 93 includes aplate-like substrate installation body engaging portion 95 and asubstantially flat-shaped transfer roller engaging portion 97 and isformed in an L-shape in view of the Y-direction.

In view of the Y-direction, the substrate installation body engagingportion 95 is formed along the Z-direction and comes in contact with thesubstrate installation body 25.

In view of the Y-direction (as viewed in the extending direction of thecentral axis of the transfer roller 51), the transfer roller engagingportion 97 is formed along in the X-direction (i.e. the moving directionof the transfer roller 51) and also extended from the upper end of thesubstrate installation body engaging portion 95 substantially in theX-direction to depart from the substrate installation body 25.

The transfer roller engaging portion 97 includes a proximal side portion99 located on the side of the substrate installation body 25 and adistal side portion 101 distant from the substrate installation body 25.The proximal side portion 99 extends in the X-direction, while thedistal side portion 101 extends obliquely to the X-direction at apredetermined angle (e.g. a slight angle of 1 to 20 degrees). Theboundary between the proximal side portion 99 and the distal sideportion 101 is rounded in an arc shape (see reference symbol R of FIG.21C).

The transfer roller 51 and the mold 7 wrapped around the transfer roller51 are configured so as to abut on the inclined member 93 over theirentire lengths in the Y-direction. Nevertheless, the transfer roller 51and the mold 7 wrapped around the transfer roller 51 may be configuredso as to abut on the inclined member 93 partially. For example, only oneend of the transfer roller 51 formed with no transfer pattern or onlyone end of the mold 7 (one end or the other end of the mold 7 in theY-direction) wound around the transfer roller 51 may be configured so asto abut on the inclined member 93.

Further, the transfer apparatus 1 is configured so that, when the mold 7is peeled off from the resin 5 by the roll-transferring operation, onetransfer roller guide part 91 (the front inclined member 93B) eliminatesor mitigates the shock at the start of peeling off the mold 7 from theresin 5, while the other transfer roller guide part 91 (the rearinclined member 93A) eliminates or mitigates the shock at the end ofpeeling off the mold 7 from the resin 5.

In connection, either the front inclined member 93B or the rear inclinedmember 93A may be deleted in the modification.

Here, the operation of the transfer roller 51 and the like when startingthe pressing of the mold 7 against the ultraviolet curing resin 5 on thesubstrate 3 (i.e. when the engagement of the transfer roller 51 with thesubstrate 3 and the like installed in the substrate installation body 25is started) will be described below.

First, in a state where the transfer roller 51 is positioned on theright side (rear side) more than the position illustrated in FIG. 21A,the transfer roller 51 and the mold 7 are separated from the rearinclined member 93A. When the transfer roller 51 moves to the front side(left side) from the above state, the transfer roller 51 abuts on thedistal side portion 101 of the rear inclined member 93A through the mold7, as illustrated in FIG. 21A. The position of the mold 7 at thisabutment (i.e. a. portion of the mold 7 abutting on the distal sideportion 101) is located slightly lower than the upper surface of thesubstrate 3 installed in the substrate installation part 13, in theZ-direction.

Additionally, as the inclination angle of the distal side portion 101 isrelatively small, it is possible to reduce the shock at the abutment.

When the transfer roller 51 further moves to the front side (left side)from the position illustrated in FIG. 21A, the transfer roller 51 isurged upward by the distal side portion 101, so that the roller 51 movesupward gradually. At this time, the transfer roller 51 maintains itsstate where it is abutting on the distal side portion 101 through themold 7.

When the transfer roller 51 further moves to the front side (left side),the transfer roller 51 abuts on the proximal side portion 99 of the rearinclined member 93A through the mold 7.

Then, when the transfer roller 51 further moves to the front side (leftside), the transfer roller 51 moves in the horizontal direction (theX-direction) while maintaining the state where the transfer roller 51 isabutting on the proximal side portion 99 through the mold 7. At thistime, the position of the mold 7 (i.e. a portion of the mold 7 abuttingon the distal side portion 101) coincides with the position of the uppersurface of the substrate 3 installed in the substrate installation part13, in the Z-direction.

When the transfer roller 51 further moves to the front side (left side),as illustrated in FIG. 21B, the pressing of the mold 7 against the resin5 (the substrate 3) is started. At the start of this pressing, the shockis hardly produced since there is no change in the height of thetransfer roller 51. Consequently, the possibility that an edge (oredges) of the substrate 3 and the like may be missing decreases.

Still further, when the transfer roller 51 moves to the front side (leftside), the transfer roller 51 abuts on the front inclined member 93Bthrough the mold 7. At this time, since the height of the transferroller 51 away from the substrate 3 installed in the substrateinstallation part 13 does not change abruptly, it is possible toeliminate or mitigate the shock at the end of the pressing process thatthe mold 7 is pressed against the substrate 3 through the transferroller 51, whereby the possibility that an edge (or edges) of thesubstrate 3 and the like may be missing decreases.

Incidentally, although FIG. 21C illustrates an arrangement where therear inclined member 93A (or the front inclined member 93B) and thesubstrate 3 are slightly spaced apart from each other by a smalldistance L3 in the X-direction (e.g. a distance smaller than thethickness of the substrate 3 and much smaller than the radius of thetransfer roller 51), the distance L3 may be zero.

Further, the rear inclined member 93A (the front inclined member 93B)may be configured so that its height can be adjusted in relation to thesubstrate installation body 25 according to the thickness of thesubstrate 3.

The operation of the transfer roller 5.1 and the like at the time ofpeeling off the mold 7 from the cured ultraviolet curing resin 5 (thesubstrate 3) is opposite to the operation of the transfer roller 51 atthe time of starting the above-mentioned pressing of the mold 7 againstthe resin 5. However, the transfer roller 51 and the mold 7 abut on thefront inclined member 93B in advance.

The transfer apparatus 1 may be configured so as to omit the rearinclined member 93A or the front inclined member 93B. In FIG. 1 and thelike, these components are deleted.

Next, the operation of the transfer apparatus 1 will be described.

In an initial state, as illustrated in FIG. 1, there are illustratedvarious situations: the mold 7 is installed in the transfer apparatus;the first supporting body 73 is positioned at the front end position;the second supporting body 75 is positioned at the rear end position;the head 57 of the plasma unit 55 generating no plasma is positioned atthe upper end position; and the transfer roller 51 and the ultravioletray generator 53 are positioned at the upper end position. Additionally,the substrate 3 is mounted on the substrate installation body 25.

The upper part of the substrate installation body 25 is formed of aconductive material to act as an electrode when irradiating plasma.

Under the control of the control unit 41, from the above-mentionedinitial state, it is performed to position the head 57 of the plasmaunit 55 at the lower end position (see FIG. 6) and further move thefirst support body 73 to the rear side (see FIG. 7) while generatingplasma from the head 75 toward the lower substrate 3. Further, with theinkjet head 31, it is performed to coat the uncured ultraviolet curingresin 5 on the substrate 3.

FIG. 8 illustrates a state where the process of coating the uncuredultraviolet curing resin 5 on the substrate 3 has been completed. Inthis state, plasma is not generated from the head 57 and furthermore,the discharge of the uncured ultraviolet curing resin 5 from the inkjethead 31 is also stopped.

Subsequently, with the forward movement of the first supporting body 73,it is performed to position it at the front end position and alsoposition the transfer roller 51 and the ultraviolet ray generator 53 atthe lower end position, as illustrated in FIG. 9.

Next, as illustrated in FIG. 10, it is performed to press the mold 7against the substrate 3 while moving the second supporting member 75 tothe front side. At this time, the mold 7 extends from the rolled webmold 43 as the transfer roller 51 moves to the front side, and theultraviolet curing resin 5 of the substrate 3 is irradiated withultraviolet rays from the ultraviolet ray generator 53.

FIG. 11 illustrates a state where the process of pressing the mold 7against the substrate 3 has been completed. In this state, ultravioletrays are not generated from the ultraviolet ray generator 53.

Subsequently, from the state illustrated in FIG. 11, it is performed tomove the second supporting member 75 to the rear side and peel off themold 7 from the substrate 3 and the resin 5. Then, the mold 7 is woundup by the rolled web mold 43, and the ultraviolet curing resin 5 of thesubstrate 3 is irradiated with ultraviolet rays from the ultraviolet raygenerator 53.

In the state where the peeling of the mold 7 from the substrate 3 andthe resin 5 has been completed (see FIG. 12), the second supportingmember 75 is located at the rear end position, so that the operation oftransferring the transfer pattern 9 of the mold 7 to the resin 5 of thesubstrate 3 is completed. In a case of performing the next transferoperation, the substrate 3 is replaced by a substrate 3 to be subjectedto next transfer.

Next, the cleaning process of the mold 7 by the plasma unit 55 will bedescribed.

An object of the mold 7 to be cleaned up by the plasma unit 55 is aportion of the mold 7 (particularly, the fine transfer pattern 9) whichhas been used for the transfer operation to the ultraviolet curing resin5 of the substrate 3.

As illustrated in FIG. 12, it is performed to position the head 57 ofthe plasma unit 55 at the upper end position and rotate the head 57about the axis C1 of FIG. 1 so as to generate plasma toward the rearside, thereby allowing the first support body 73 to be positioned at therear end position and allowing the head 57 to be positioned in thevicinity of the mold 7.

In the state of FIG. 12, plasma is generated from the head 57 toward themold 7, and the whole portion of the mold 7 used for the transferoperation to the resin 5 of the substrate 3 is irradiated with plasmafor cleaning while appropriately performing the delivery and windingprocesses of the mold 7 by the rolled web mold 43 and the winding roll47.

A conductive plate (not illustrated) is provided on the opposite side ofthe head 57 through the mold 7. This conductive plate acts as anelectrode when the plasma unit 55 irradiates the plasma to the mold 7.

The cleaning of the mold 7 by the plasma unit 55 may be performed whenthe mold 7 is peeled off from the cured ultraviolet curing resin 5, inplace of or in addition to the cleaning in the state illustrated in FIG.12. That is, the mold 7 may be cleaned by irradiating the plasma fromthe plasma unit 55 onto a portion of the mold 7 immediately after it hasbeen peeled off from the cured ultraviolet curing resin 5 in theroll-transferring.

More specifically, when the second supporting body 75 is moved rearwardfrom the state of FIG. 11 to the state of FIG. 12 to peel off the mold 7from the substrate 3 and the ultraviolet curing resin 5, it may beperformed to also move the head 57 of the plasma unit 55 (the firstsupporting body 73) rearward and further irradiate the plasma from theplasma unit 55 onto the mold 7 immediately after it has been peeled fromthe ultraviolet curing resin 5.

The rearward moving speed of the head 57 of the plasma unit 55 coincideswith, for example, the moving speed of the second supporting body 75.Then, when the second supporting body 75 and the head 57 of the plasmaunit 55 move rearward, the distance in the X-direction between thesecond supporting body 75 and the head 57 becomes a constant distanceallowing the plasma to be irradiated the mold 7.

In addition, when plural transfer operations are performed in order byrepeatedly using a fixed portion of the mold 7 for the ultravioletcuring resin 5 of a plurality of substrates 3, the irradiation amount(at least one of the irradiation times and the irradiation intensity) ofplasma to a portion of the mold 7 that is used for transfer by theplasma unit 55 may be changed according to the number of transferringtimes.

We now explain in more detail. As illustrated in FIG. 12, aftercompleting to peel off the mold 7 from the ultraviolet curing resin 5,this peeled mold 7 is irradiated with plasma from the plasma unit 55.The cleaning of the mold 7 is accomplished by appropriately performingthe winding-up and unwinding of the mold 7 by the rolled web mold 43 andthe winding roll 47 after completing the peeling of the mold 7 andsubsequently irradiating the plasma to the whole portion of the mold 7that is used for transfer to the ultraviolet curing resin 5 of thesubstrate 3.

In this manner, the portion of the mold 7 used for transfer repeats tobe cleaned by plasma irradiation and to be used for transfer again. Inthis case, the cleaning of the mold 7 is executed more carefully as thenumber of times used for transferring increases.

For example, after completing the first transfer operation, it isperformed from the state of FIG. 12 to carry out the winding-up andunwinding of the mold 7 by the rolled web mold 43 and the winding roll47 only one round and then, plasma is irradiated to the entire portionof the mold 7 used for transferring to the ultraviolet curing resin 5 ofthe substrate 3.

Incidentally, the irradiation of plasma may be carried out on both ofmotions forming one reciprocation of the winding-up and unwinding of themold 7 or either one of both motions forming one reciprocation of thewinding-up and unwinding of the mold 7.

Likewise, after completing the second transfer operation, it isperformed from the state of FIG. 12 to carry out the reciprocatingoperation of winding-up and unwinding of the mold 7 two-round trip andthen, plasma is irradiated to the entire portion of the mold 7 used fortransferring to the ultraviolet curing resin 5 of the substrate 3.

Also in the third and subsequent transfer operation, similarly, thereciprocating operations of winding-up and unwinding of the mold 7 arecarried out as many times as the number of times of transfer and then,plasma is irradiated to the entire portion of the mold 7 used fortransfer to the ultraviolet curing resin 5 of the substrate 3. Then,when transfer is performed a predetermined number of times (for example,5 times), the mold 7 is fed from the rolled web mold 43 to the windingroll 47, and the portion of the mold 7, which has been used fortransferring, will be exchanged.

In this way, by changing the irradiation dose of plasma to be irradiatedagainst the mold 7 by the plasma unit 55 according to the number oftimes of transferring, it is possible to appropriately clean the mold 7whose contamination degree is getting increased as the number of timesof transferring increases.

Additionally, there may be provided a mold detecting part (notillustrated) that detects the contamination degree of the portion of themold 7 peeled off from the ultraviolet curing resin 5. For example, atransmission type photoelectric sensor, a reflection type photoelectricsensor or the like can be adopted as the mold detecting part.

In connection, the transfer apparatus 1 may be configured so as to judgewhether or not the cleaning of the mold 7 by the plasma unit 55 isinsufficient, according to the detection result of the mold detectingpart.

For example, the transfer apparatus 1 may be configured so that, whenthe mold detecting part detects the mold 7 after cleaning by the plasmaunit 55 and if the contamination degree of the portion of the mold 7peeled off from the ultraviolet curing resin 5 is larger (severer) thana predetermined threshold value (e.g. when the amount of the residualresin exceeds a predetermined value), the mold 7 is exchanged uponjudgment that the cleaning of the mold 7 by the plasma unit 55 wasinsufficient.

Alternatively, the mold detecting part may be adapted so as to detect adisturbance (e.g. defect) of the transfer pattern 9 in the portion ofthe mold 7 peeled off from the ultraviolet curing resin 5 may bedetected by the mold detection portion. Namely, the transfer apparatus 1may be configured so that, when the mold detecting part detects the mold7 after cleaning by the plasma unit 55 and if the shape of the transferpattern of the portion of the mold 7 peeled off from the ultravioletcuring resin 5 is broken with a certain degree larger than apredetermined threshold value, the mold 7 is exchanged.

The coating part 15 and the head 57 of the plasma unit 55 simultaneouslymove in relation to the substrate 3 installed in the substrateinstallation part 13. In this context, the transfer apparatus 1 may beconfigured so that, when the coating part 15 and the head 57 move, theuncured ultraviolet curing resin 5 is coated on the substrate 3 by thecoating part 15 while plasma is irradiated on the substrate 3 by theplasma unit 55.

More specifically, the coated portion 15 and the head 57 of the plasmaunit 55 are adapted so as to move together in the X-direction inrelation to the substrate 3 installed in the substrate installation part13. The coating part 15 is positioned in front of the plasma unit 55 inthe X-direction.

Thus, the transfer apparatus 1 may be configured so that, when thecoating part 15 and the head 57 of the plasma unit 55 move from theirpositions (see FIG. 6) in front of the substrate 3 installed in thesubstrate installation part 13 toward the rear side, the head 57 of theplasma unit 55 first irradiates the substrate 3 in the substrateinstallation part 13 with plasma and immediately thereafter, the coatingpart 15 coats the substrate 3 in the substrate installation part 13 withthe uncured ultraviolet curing resin 5.

The uncured ultraviolet curing resin 5 cannot be cured by the plasmairradiated from the head 57 of the plasma unit 55 to the substrate 3.Nevertheless, if the uncured ultraviolet curing resin 5 is possiblycured by the plasma irradiated from the head 57 of the plasma unit 55 tothe substrate 3, a shield (not illustrated) for shielding the plasmairradiated from the head 57 of the plasma unit 55 is provided to preventthe plasma irradiated from the head 57 of the plasma unit 55 fromreaching the uncured ultraviolet curing resin 5 coated in the coatingpart 15.

With simultaneous movements of the coating part 15 and the head 57 ofthe plasma unit 55 in relation to the substrate 3 installed in thesubstrate installation part 13, since the uncured ultraviolet curingresin 5 is coated on the substrate 3 by the coating part 15 whileirradiating the substrate 3 with the plasma from the plasma unit 55, theimprovement in wettability of the substrate 3 and the coating of thesubstrate 3 with the uncured ultraviolet curing resin 5 can be performedalmost simultaneously, thereby allowing the time required for transferto be shortened.

Further, the plasma unit 55 is configured to irradiate the plasma alsoto the mold 7 peeled off from the ultraviolet curing resin 5 of thesubstrate 3 after transfer. In connection, since the driver 59 issupported by the coating part 15, the coating portion 15, the head 57and the driver 59 are simultaneously moved together in the X-direction.

Since the transfer apparatus 1 is configured to irradiate plasma fromthe head 57 driven by the driver 59 of the plasma unit 55 to thesubstrate 3 and the mold 7 peeled off from the ultraviolet curing resin5 on the substrate 3 after transfer, the driver 59 and the head 57 ofthe plasma unit 55 are commonly used.

Here, the communalization of the head 57 of the plasma unit 55 will bedescribed in detail.

The surface of the substrate 3 irradiated with plasma by the plasma unit55 and the surface of the mold 7 irradiated with plasma by the plasmaunit 55 intersect with each other.

The surface of the substrate 3 irradiated with plasma by the plasma unit55 is, for example, a plane orthogonal to the Z-direction, while thesurface of the mold 7 irradiated with plasma by the plasma unit 55 is,for example, a plane orthogonal to the Z-direction. Thus, the surface ofthe substrate 3 irradiated with plasma by the plasma unit 55 and thesurface of the mold 7 irradiated with plasma by the plasma unit 55 areorthogonal to each other.

The head 57 is adapted so as to enable rotation positioning to thecoating part 15 and the like. In the plasma unit 55, the head 57 isconfigured so that its posture when irradiating plasma from the head 57to the surface of the substrate 3 is turned to the posture whenirradiating the plasma from the head 57 to the surface of the mold 7 bya predetermined angle (e.g. 90 degrees).

More specifically, the head 57 of the plasma unit 55 is supported by thefirst supporting body 73 so as to occupy the rotating position about theaxis C1 extending in the Y-direction, for example, at an angle of 90degrees. Owing to this rotational positioning, it is possible to switchthe direction of generating plasma between the rear side in theX-direction and the lower side in the Z-direction.

With the above-mentioned arrangement, when irradiating plasma from thehead 57 to the surface of the substrate 3, the plasma is generatedtoward the lower side in the Z-direction. On the other hand, whenirradiating plasma from the head 57 to the surface of the mold 7, theplasma is generated toward the rear side in the X-direction.

As the posture of the head 57 when irradiating plasma from the head 57to the surface of the substrate 3 is obtained by rotating the posture ofthe head 57 when irradiating plasma from the head 57 to the surface ofthe mold 7 by a predetermined angle, it becomes possible to irradiateplasma to the substrate 3 and the mold 7 in different positions andpostures from each other precisely.

Next, the installation of the mold 7 on the transfer apparatus 1 usingthe mold installation assisting part 61 will be described.

We now assume, as an initial state, that: the second supporting body 75is positioned at the rear end position; the mold installation assistingmember 69 is positioned at the front end position; and the rolled webmold 43 is not installed in the rolled web mold installation part 45, asillustrated in FIG. 13.

In the initial state as described above, it is performed to install thecore material 63 in the rolled web mold 43 (see FIG. 14), appropriatelyextend the mold 7 from the rolled web mold 43 and install the moldsupporting part 65 integrally with the installation assisting member 69(see FIG. 15).

Subsequently, by moving the mold installation assisting member 69 to therear side while appropriately extending the mold 7 from the rolled webmold 43, it is performed to make a situation where the mold installationassisting member 69 is positioned at the rear end position (see FIG.16). During this movement, the mold 7 extending between the rolled webmold 43 and the mold supporting part 65 is wound around the transferroller 51 and the guide roller 85.

Subsequently, it is performed to detach the leading end of the mold 7from the mold supporting part 65 and fix the leading end to the corematerial 67 of the winding roll 47 (see FIG. 17).

According to the transferring apparatus 1, since the inkjet head 31 isused to coat the substrate 3 with the uncured resin 5, it is possible toimprove the coating accuracy of the uncured resin 5 to be applied to thesubstrate 3 (for example, the accuracy of a film thickness of theultraviolet curing resin 5). That is, it is possible to provide theresin 5 on the substrate 3 more precisely and thinly, in comparison withthe other coating methods such as spraying.

With the improved accuracy of a film thickness of the resin 5, thevolume of the resin 5 before the transfer operation can be generallyequalized with that of the resin 5 after the transfer operation, therebyallowing the residual film 11 after the transfer operation to be reducedin thickness as much as possible or allowing the generation of theresidual film 11 to be suppressed.

Further, according to the transferring apparatus 1, since the pluralityof inkjet heads 31 is arranged, it is possible to apply the uncuredultraviolet curing resin 5 only to a portion of the substrate 3requiring to be coated with the resin 5. For example, by optionallysetting the inkjet head(s) 31 intended to discharge the uncuredultraviolet curing resin 5 from among the plurality of inkjet heads 31,it is possible to cope with even a change in the size of the substrate 3flexibly. Further, in case of transferring a plurality of transferpatterns 9 by one time of transfer (for example, when it is required tosecure four or eight pieces from one substrate 3), it is possible tocope with a change in the form of the mold 7 (e.g. a change from8-pieces to 4-pieces to be secured) flexibly.

According to the transferring apparatus 1, additionally, since theplurality of inkjet heads 31 is disposed alternately, a gap between theinkjet heads 31 (which would produce a substrate portion where the resin5 is not applied) is prevented from occurring when coating the substrate3 with the uncured ultraviolet curing resin 5.

According to the transferring apparatus 1, as illustrated in FIG. 20,since the uncured ultraviolet curing resin 5 on the substrate 3 isformed in a shape corresponding to the fine transfer pattern 9 formed inthe mold 7, the flow rate of the uncured ultraviolet curing resin 5 atthe time of performing the transfer operation is reduced to allow theoccurrence of the residual film 11 to be further suppressed andadditionally, the shape of the transfer pattern 9 on the resin 5 becomesprecise with high geometrical accuracy.

Further, according to the transfer apparatus 1, since the ultravioletcuring resin 5 is irradiated with ultraviolet rays when the transferroller 51 is moving to the front side and when the transfer roller 51 ismoving to the rear side, it is possible to spend a long time forirradiating the resin 5 with ultraviolet rays, thereby allowing theultraviolet curing resin 5 to be securely cured without using alarge-output ultraviolet ray generator 53 (i.e. without enlarging theultraviolet ray generator 53).

Further, according to the transfer apparatus 1, the fine transferpattern 9 of the mold 7 peeled off from the ultraviolet curing resin 5of the substrate 3 after the transfer operation is cleaned by the plasmaunit 55. Thus, even when the mold 7 is repeatedly used several times, itis possible to prevent the deterioration of the releasability of themold 7 and the deterioration of the configuration of a pattern to betransferred to the resin 5 of the substrate 3.

Further, according to the transfer apparatus 1, since the wettability ofthe substrate 3 is improved by the plasma unit 55, it is possible toenhance the adhesion strength between the substrate 3 and the resin 5due to the increased hydrophilicity of the substrate 3.

Further, according to the transfer apparatus 1, since the plasma unit 55is supported by the coating part 15 which is not voluminous with a smallvolume for installation, the large and bulky driver 59 of the plasmaunit 55 is arranged with ease.

Further, according to the transferring apparatus 1, since it is providedwith the mold installation assisting part 61 that winds the mold 7,which has been fed out from the rolled web mold 43 in the rolled webmold installation part 45, around the transfer roller 51 and also guidesthe mold 7 up to the winding roll 47 in the winding roll installationpart 49, the precise installation of the mold 7 into the transferapparatus 1 can be performed without requiring a skilled person, easilyand quickly.

Meanwhile, it is noted that in the above explanation, one transferpattern 9 is transferred to the resin 5 of one substrate 3 by performingone transfer operation to the substrate 3. In the modification, however,the transfer apparatus 1 may be configured so as to transfer a pluralityof transfer patterns 9 to the resin 5 on one substrate 3 by performingone transfer operation to the substrate 3.

In the case where the plurality of transfer patterns 9 is transferred tothe resin 5 of one substrate 3, the substrate 3 will be divided into aplurality of substrate portions each having a single transfer pattern 9transferred thereto, thereby producing a plurality of products orsemi-products.

For example, when a transfer pattern (for example, the same transferpattern) 9 is transferred to each of the four portions where the resin 5of one substrate 3 is provided by one transfer, the substrate 3 isdivided into four equal parts By dividing it, you will get 4 products orsemi-finished products.

In the above description, the transfer operation is performed oncondition of winding a part of the mold 7 extending between the rolledweb mold 43 and the winding roll 47 around the transfer roller 51. Inthe modification, however, the transfer operation may be performed oncondition of fixing one mold (a short mold whose length is equivalent tothat of an outer circumference of the transfer roller 51) 7 to the outercircumference of the transfer roller 51 (or winding one mold around theroller 15 integrally). In this case, the mold 7 will be detachably(exchangeably) provided on the transfer roller 51.

That is, the transfer apparatus 1 may be configured so as to perform, inthe transfer operation, the pressing process of the mold 7 against theresin 5 and the peeling-off process of the mold 7 from the resin 5 bymoving the transfer roller 51 from one end of the substrate 3 to theother end in the X-direction under condition that the mold 7 is pressedagainst the substrate 3 and the uncured resin 5 in the form of a thinfilm coated on the substrate 3. In this modification, thermoplasticresin could be used as the resin 5 in some cases.

It should be noted that the above-described matters can be grasped asconstituents of an invention of process.

That is, the present application may be grasped as a transfer method oftransferring a fine transfer pattern 9 formed on a mold 7 to a resin 5coated on a substrate 3, the transfer method including a coating step ofejecting the uncured resin 5 in the form of fine particles from a inkjethead 31, thereby coating the substrate 3 with the resin 5.

Alternatively, the present application may be grasped as a transfermethod of transferring a fine transfer pattern 9 formed on a mold 7 to aresin 5 coated on a substrate 3, the transfer method including a plasmairradiation step of irradiating plasma to the fine transfer pattern 9 ofthe mold 7 peeled off from the resin 5 of the substrate 3 aftertransfer.

Also, the present application may be grasped as a transfer method oftransferring a fine transfer pattern 9 formed on a mold 7 to a resin 5coated on a substrate 3, the transfer method including: a rolled webmold installation step of installing the rolled web mold 43 around whichthe mold 7 is wound, in a rolled web mold installation part 45; a moldwinding step of winding the mold 7, which has been fed out from therolled web mold 43 installed at the rolled web mold installation step,around the transfer roller 51; a mold winding roll installation step ofinstalling an end of the mold 7, which has been fed out from the rolledweb mold 43 installed in the rolled web mold installation part 45 at therolled web mold installation step and then wound around the transferroller 51, in a winding roll 47 installed in a winding roll installationpart 49; and a mold guide step to be performed when the mold windingstep and the mold winding roll installation step are performed afterinstalling the rolled web mold 43 at the rolled web mold installationstep, wherein the mold guide step includes: winding the mold 7, whichhas been fed out from the rolled web mold 43 installed in the rolled webmold installation part 45, around the transfer roller 51 under conditionthat a fed-out portion of the mold fed out from the rolled web mold 43is stretched while suppressing an occurrence of wrinkles in the fed-outportion; and guiding the wound mold up to the vicinity of the windingroll 47 installed in a winding roll installation part 49 with use of amold installation assisting part 61.

In this case, before performing the rolled web installation step, themold winding step and the mold winding roll installation step, a majorportion on one end side in the longitudinal direction of the mold 7 iswound around a core material 63 of the rolled web mold 43, while a smallmold portion on the other end side in the longitudinal direction of themold 7 is extended from the rolled web mold 43, and a further leadingend of the extended small portion of the mold 7 is installed in amolding supporting part 65. The mold installation assisting part 61includes a mold installation assisting member 69 which is freely movableto all of the rolled web mold 45, the transfer roller 51 and the windingroll installation part 49 and in which the mold supporting part 65 isinstalled.

What is claimed is:
 1. A transfer apparatus for transferring a finetransfer pattern formed on a mold to a resin coated on a substrate,comprising: a coating part configured to coat the resin in an uncuredstate on the substrate; a substrate installation part configured toposition and install the substrate therein integrally; a moldinstallation part configured to install the mold in a form of a sheettherein; a transfer roller configured to transfer the fine transferpattern formed on the mold to the resin coated on the substrate; and aplasma unit configured to irradiate plasma to the mold peeled off fromthe resin after the transfer pattern formed on the mold is transferredto the resin coated on the substrate, thereby cleaning the mold; whereinthe mold peeled off from the resin on the substrate is used again fortransferring of the transfer pattern after being cleaned by irradiationof the plasma by the plasma unit.
 2. The transfer apparatus of claim 1,wherein the plasma unit is configured to change an irradiation dose ofthe plasma to the mold according to the number of times when thetransfer is performed by the mold.
 3. The transfer apparatus of claim 1,further comprising: a rolled web mold configured to wind the moldtherearound; and a winding roll configured to be capable of winding upthe mold fed out from the rolled web mold, wherein the transfer rolleris wound with the mold extending between the rolled web mold and thewinding roll, and the transfer apparatus is configured to: perform bothpressing of the mold against the resin and peeling off the mold from theresin, by roll-transferring of moving the transfer roller on a conditionthat the transfer roller is pressing the mold against the resin; andallow the plasma unit to irradiate the plasma to the mold after thepeeling off the mold from the resin is completed.
 4. The transferapparatus of claim 3, wherein when the cleaning of the mold by theplasma unit is insufficient, the winding roll operates to wind up aportion of the mold peeled off from the resin and instead, a new portionof the mold is unwound from the rolled web mold.
 5. The transferapparatus of claim 4, further comprising a mold detecting partconfigured to detect contamination of the mold peeled off from theresin, wherein the transfer apparatus is configured to judge whether ornot the cleaning of the mold by the plasma unit is insufficientaccording to a detection result by the mold detecting part.
 6. Atransfer apparatus for transferring a fine transfer pattern formed on amold to a resin coated on a substrate, comprising: a coating partconfigured to coat the resin in an uncured state on the substrate; asubstrate installation part configured to position and install thesubstrate therein integrally; a mold installation part configured toinstall the mold in a form of a sheet therein; a transfer rollerconfigured to transfer the fine transfer pattern formed on the mold tothe resin coated on the substrate; and a plasma unit configured toirradiate plasma to the substrate, wherein the plasma unit includes ahead and a driver and the coating part and the plasma unitsimultaneously move in relation to the substrate, and the coating partcoats the resin in an uncured state on the substrate while the plasma isirradiated to the substrate by the plasma unit.
 7. The transferapparatus of claim 6, wherein the plasma unit is configured to irradiateplasma also to the mold peeled off from the resin on the substrate aftertransferring, the driver of the plasma unit is supported by the coatingpart, and the plasma is irradiated from the plasma unit driven by thedriver to the substrate and the mold peeled off from the resin on thesubstrate after transferring.
 8. The transfer apparatus of claim 7,wherein the plasma is irradiated from the head of the plasma unit to thesubstrate and the mold peeled off from the resin on the substrate aftertransferring.
 9. The transfer apparatus of claim 6, wherein the head isprovided so as to enable rotation positioning to the coating part, andthe transfer apparatus is configured so that a posture of the head whenthe plasma is irradiated from the head to the substrate rotates inrelation to the posture of the head when the plasma is irradiated fromthe head to the mold by a predetermined angle.
 10. A transfer method fortransferring a fine transfer pattern formed on a mold to a resin coatedon a substrate, comprising: coating the resin in an uncured state on thesubstrate with use of a coating part; and irradiating plasma to thesubstrate with use of a plasma unit, wherein, the plasma unit includes ahead and a driver, and with simultaneous movement of the coating partand the plasma unit in relation to the substrate, the resin in theuncured state is coated on the substrate at the step of coating whileirradiating the plasma to the substrate at the step of irradiating. 11.A transfer apparatus for transferring a fine transfer pattern formed ona mold to a resin coated on a substrate, comprising: a coating partconfigured to coat the resin in an uncured state on the substrate, theresin being curable by an electromagnetic wave having a predeterminedwavelength; a substrate installation part configured to position andinstall the substrate therein integrally; a mold installation partconfigured to install the mold in a form of a sheet therein; a plasmaunit configured to irradiate plasma to the substrate; a transfer rolleraround which the mold is wound, the transfer roller being configured toperform both pressing of the mold against the resin and peeling off themold from the resin, by roll-transferring of moving the transfer rolleron condition that the transfer roller is pressing the mold against theresin; a resin curing part configured to irradiate the electromagneticwave having the predetermined wavelength to the resin under conditionthat the transfer roller is pressing the mold against the resin of themold; and a control unit configured to control the resin curing part sothat the electromagnetic wave having the predetermined wavelength isirradiated to the resin when the transfer roller moves in a direction topress the mold against the resin by the roll-transferring.
 12. Thetransfer apparatus of claim 11, wherein the control unit is configuredto control the resin curing part so that the electromagnetic wave havingthe predetermined wavelength is irradiated to the resin even when thetransfer roller moves in a direction to peel off the mold from the resinon the mold by the roll-transferring.
 13. The transfer apparatus ofclaim 11, wherein the control unit is configured to control the resincuring part so that the intensity of the electromagnetic wave having thepredetermined wavelength to be irradiated to the resin is adjustedaccording to a moving amount of the transfer roller in theroll-transferring.
 14. The transfer apparatus of claim 11, wherein thecoating part includes a plurality of inkjet heads arranged in astaggered manner, and the substrate is coated by discharging the uncuredresin in the form of fine particles through the plurality of inkjetheads.
 15. The transfer apparatus of claim 11, wherein the control unitis configured to control the coating part so that the uncured resincoated on the substrate is formed in a shape according to the finetransfer pattern formed on the mold.
 16. The transfer apparatus of claim15, wherein the control unit is configured to control: the coating partso that the uncured resin is adjusted and coated corresponding to thetransfer pattern formed on the mold; and the resin curing part so thatthe intensity of the electromagnetic wave having the predeterminedwavelength is adjusted according to an amount of the resin coated on thesubstrate.